English
SUNFUN Group specializes in intelligent and sustainable industrial development. Driving quality advancement in manufacturing across China and the globe through technological innovation, we are committed to creating green value for a better human life.
We have deep expertise in smart energy and smart manufacturing, consistently achieving breakthroughs in precision production. Our capabilities range from 0.001-mm precision machining to the manufacture of components weighing from 0.1 grams to 150 tons. We maintain energy consumption within 0.1% and implement fully intelligent process management—all supported by four decades of specialized experience!
Innovation is the foundation of the growth of our group. We have built an open and collaborative innovation ecosystem, partnering with governments, enterprises, universities, and institutions to enable cooperative innovation and shared value, injecting sustained momentum into the industry.<br/>
As an accredited technology enterprise with its own institute and talent academy, SUNFUN has completed more than ten national-level R&D tasks and undertaken major projects commissioned by agencies such as the NDRC, MOST, and MIIT.
Product Features
Non-contact handling: Adsorbed by Bernoulli airflow without touching the wafer, scratch-resistant and contaminated, suitable for thin/brittle workpieces.
Ceramic strong performance: Alumina material is hard, wear-resistant, heat-resistant, corrosion-resistant, and does not deform or flake off over a long period of use.
Ultra-clean and low disturbance: The ceramic is dense, with no impurity precipitation, few particles, no static electricity, and meets semiconductor cleanliness requirements.
Accurate precision: Low coefficient of thermal expansion, stable size when temperature changes, small handling and positioning error, ensuring chip yield.
Wide scene adaptability: Can operate stably in vacuum, high temperature, corrosive environments(photolithography/etching, etc.), covering multiple semiconductor processes.
