English
SUNFUN Group specializes in intelligent and sustainable industrial development. Driving quality advancement in manufacturing across China and the globe through technological innovation, we are committed to creating green value for a better human life.
We have deep expertise in smart energy and smart manufacturing, consistently achieving breakthroughs in precision production. Our capabilities range from 0.001-mm precision machining to the manufacture of components weighing from 0.1 grams to 150 tons. We maintain energy consumption within 0.1% and implement fully intelligent process management—all supported by four decades of specialized experience!
Innovation is the foundation of the growth of our group. We have built an open and collaborative innovation ecosystem, partnering with governments, enterprises, universities, and institutions to enable cooperative innovation and shared value, injecting sustained momentum into the industry.<br/>
As an accredited technology enterprise with its own institute and talent academy, SUNFUN has completed more than ten national-level R&D tasks and undertaken major projects commissioned by agencies such as the NDRC, MOST, and MIIT.
We provide a comprehensive range of high-performance key components for thin-film deposition equipment, custom-engineered for ALD (Atomic Layer Deposition), CVD (Chemical Vapor Deposition), and PVD (Physical Vapor Deposition) systems. Our product lineup includes critical modules such as gas showerheads, heater pedestals, wafer susceptors, and precision shielding sets.
Utilizing high-purity aluminum alloys, stainless steel, and advanced technical ceramics, we leverage 5-axis precision machining and specialized surface treatments (e.g., precision bead blasting and hard-anodizing). These processes ensure exceptional durability in high-temperature, corrosive, and plasma-rich environments. Through rigorous quality control, our components are designed to minimize particle contamination and extend maintenance cycles (MTBC), enabling customers to achieve superior film uniformity and high-process repeatability.
